稀有金属材料与工程

356Vol.35,No.620066RAREMETALMATERIALSANDENGINEERINGJune20062005-07-14503710291969430074027-87542494E-mail:[e-mail](430074)CoFeZrRECoFeZrREDyTbCoFeZrRE2GHzµ′µ″200TM277A1002-185X(2006)06-0986-04(EMI)[1]Co100-xTMxTM=ZrTiNbMHzµ′Co100-yREyRENdPrDyTbRE20at%y30at%(Hc)(Hp)(4πMs)[2]TMRECoCoFe(SRF)(Ms)Hk(Ms)(ρ)Hk(Hc)[3](Co63Fe26Zr11)100-yREyRESPF-430H210-5PaAr90mm150W~250WMircoLABMKцD/Max-3BX(XRD)HitachiH600-TEMKOSAKAET350(VSM)HP8722ESArPArRFPin1200nm6CoFeZrRE·987·Co63Fe24Zr11Nd24πMsPArPin4πMsPArPinPArPinAr,4πMs1Co63Fe24Zr11Nd2Fig.1MagnetizationvstechnologyconditionsforCo63Fe24Zr11Nd22Co63Fe24Zr11Nd24πMsρt400nmXXPSFe4πMs500nm4πMs800nm50nm40µΩ.cm180µΩ.cmXRD300nmCo63Fe24Zr11Nd233Co63Fe24Zr11Nd2X300nmXRD500nmXRDSheller7nmHc2Co63Fe24Zr11Nd2Fig.2MagnetizationandresistivityvsfilmsthicknessforCo63Fe24Zr11Nd2films3Co63Fe24Zr11Nd2XRDFig.3XRDspectraofCo63Fe24Zr11Nd2filmswithdifferentthickness40.3µm1.0µmCo63Fe24-Zr11Nd2TEMSADSADXRDREy0y34πMs4πMs42454851542θ/(°)1.0µm0.5µm0.3µmIntensity/a.u.015030045060075090011.011.512.012.513.013.514.0306090120150180ρρ/µΩ.cmFilmThickness,t/nm4πMs/0.1T4πMs0.10.20.30.40.50.60.70.80.98910111213150W250W350W4πMs/0.1TPAr/Pa·988·35RENdPrDyTb4πMsy1.2T4πMs1.5T50.3µm(Co63Fe26Zr11)100-yNdy4πMsNdy4Co63Fe24Zr11Nd2TEMSADFig.4MorphologyandSADpatternsbyTEMforCo63Fe24Zr11Nd2filmswithdifferentthickness:(a)0.3µmand(b)1.0µm5Co63Fe24Zr11Nd2NdFig.5MagnetizationofCo63Fe24Zr11Nd2withdifferentNdcontents(Co63Fe26Zr11)100-yREy4πMsRE(NdPrCoFeDyTbCoFe[4]CoFeRE3d-5d/6s,(Co63Fe26Zr11)100-yREy6KuREKuREyKuREyREKu(Co63Fe26Zr11)100-yREy6(Co63Fe26Zr11)100-yREyFig.6Anisotropycoefficientvscontentofrareearthelementsfor(Co63Fe26Zr11)100-yREyfilmCoFeZrRE21CoFeZr1CoFeZr[5]RETM-RERETMSKuREREyREKuKu(Pr)Ku(Tb)Ku(Dy)Ku(Nd)6PrTbKuPrCoFeZrRERECoFeZrREab0.00.51.01.52.02.53.012.513.013.514.014.515.0y/at%4πMs/0.1T0.00.51.01.52.02.53.01.01.52.02.53.03.54.0y/at%NdDyPrTbKu/10-2J·cm-36CoFeZrRE·989·14200nmCoFeZrRE2GHzNd2RECoFeZrRE2GHzTable1Magneticparametersandcomplexpermeabilityat2GHzofamorphousCoFeZrREfilmswithdifferentRESamplesµ′µ″Hk/79.6A·m-14πMs/TCo63Fe25Zr11Nd150323518.71.44Co63Fe24Zr11Nd253541821.81.39Co63Fe24Zr11Dy228757923.11.38Co63Fe24Zr11Tb249461924.51.38µ′Co63Fe26Zr11DyTb2µ′DyTbHkDyTbNd[6]1µ″DyTbµ″TbDyfr1.52GHz1.61GHz1.66GHz1.71GHzTbRECoFeZrRECoFeZrREREDyTbCoFeZrREReferences[1]DengLianwen(),JiangJianjun(),HeHuahui().ActaPhysicaSinica()[J],2004,53(12):4359[2]VeluEMT,LambethDN.JApplPhys[J],1991,69(8):5175[3]KorenivskiV.JApplPhys[J],1997,81(8):1024[4]WilliamsPI,GrundyPJ.JPhysD:ApplPhys[J],1994,27:897[5]OunadjelaK,SuranG,MachizaudF.PhysRevB[J],1989,40:578[6]LiaoShaobin().Ferromagnetism()[M].Beijing:SciencePress,1988MicrowaveElectromagneticCharacteristicsofCoFeZrREMagneticFilmsDengLianwen,HeHuahui,FengZekun,JiangJianjun,ZhangXiucheng,XiongWeihao(HuazhongUniversityofScience&Technology,Wuhan430074,China)Abstract:CoFeZrREfilmswithlargepermeabilityandmagneticlossinthemicrowavefrequencyweresynthesizedbymagnetronsputtering.Theeffectsoftechnologydetailsandfilmthicknessonthemagneticstructureandpropertieswerediscussed.InfluencesofREaddingcontentsandvarietyonanisotropy,magnetization,microwavepermeabilityandmagneticlosswereinvestigatedparticularly.ResultsshowthattheroleofheavyREelements(suchasDy,Tb)ontheimprovementofmicrowavelossismoreremarkableandtheCoFeZrREfilmsmaypresentlargemicrowavepermeabilityandmagneticloss(µ′andµ″allarelargerthan200at2GHz).Inconclusion,itispossibleforthesefilmstobeappliedinthefieldsofmicrowaveabsorptionandEMIsuppression.Keywords:magneticfilm;microwavepermeability;rareearthelementBiography:DengLianwen,Ph.D.,DepartmentofElectronicsScience&Technology,HuazhongUniversityofScience&Technology,Wuhan430074,P.R.China,Tel:[phone],E-mail:[e-mail]